Fully Automatic - No operator contact with wafer frame during processing. Operator inserts wafer cassette into system, initiates process, then removes completed wafer cassette at the end of process cycle.
Continuous Processing Cycle - No wasted handling time between UV irradiation of individual wafer frames. Intelligent transport system maintains continuous wafer frame presence over UV lamps.
Friendly WindowsTM interface. System displays
UV intensity, process time, etc. in real-time. Quality Assurance data stored
in process log.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen to counteract harmful ozone emissions. Provides safe operating environment and economical utility requirements.
Process All Standard 6”/8” Wafer Frame/Cassette
Test conditions: UV tape curing energy
= 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.