Single-frame, up to 8" wafers, UV dosage control, user-friendly digital display, lamp life indicator, lamp ON and UV intensity monitoring.


UV - 956

Compact Desktop Design - A compact system, the UV-956 does not require nitrogen or other special utility hookups, allowing for simple installation. Simply plug it in and it is ready to go.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen systems to counteract harmful ozone emissions. The UV-956 provides a safe operating environment and economical utility requirements. 


The UV-956 is the most advanced system in its class, with built-in UV irradiation Dosage Control for controlled, repeatable UV tape curing for single-frame processing. The UV-956's digital control panel displays all  process parameters on-line. The system handles all standard wafer/frame combinations up to 8" on its 300mm diameter UV irradiation window.

Wafer/Frame size:  All standard sizes, up to 8".
UV wavelength:     365nm.
Throughput:          50 frames/hr.*
Electronic Timer:  Resolution: 1 sec.
Electrical utility:    110 or 240 Vac, 50/60 Hz.
Power:                    100 W (peak).
Dimensions:           (H x W x D) 8 x 19 x 16 
                                                   (20 x 48.5 x 40.5 cm).
Height:                   23 (58 cm). (Cover open). Weight:                   44 lbs. (20 kg).
* Test conditions:          UV tape curing energy required
                                          = 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.