Single-frame, up to 12" (300mm) wafers, UV dosage control, user-friendly digital display, lamp life indicator, lamp ON and UV intensity monitoring.


UV - 957

Compact Desktop Design - A compact system, the
UV-957 does not require special utility hookups, allowing for simple installation. Just plug it in and it is ready to go.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen to counteract harmful ozone emissions. The UV-957 provides a safe operating environment and economical utility requirements. 


The UV-957 is the most advanced system in its class, with built-in UV irradiation Dosage Control for controlled, repeatable UV tape curing for single-frame processing. The UV-957's digital control panel displays all  process parameters on-line. The system handles all standard wafer/frame combinations up to 12" (300mm) on its 420mm diameter UV irradiation window.

Wafer/Frame size:  All standard sizes, up to 300mm.
UV wavelength:     365nm.
Throughput:          50 frames/hr.*
Electronic Timer:  Resolution: 1 sec.
Electrical utility:    110 or 240 Vac, 50/60 Hz.
Power:                    500 W (peak).
Dimensions:           (HxWxD) 10.2 x 29.5 x 21.7 
                               (24 x 72.5 x 53.5 cm).
Height:                   23 (58 cm) (cover open, with
Weight:                   120 lbs. (55 kg).
* Test conditions:          UV tape curing energy required
                                          = 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.